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    Grirem Advanced Materials Co.,Ltd.(hereinafter referred to as “Grirem”) was founded after an entire restructuring to National Engineering Research Center for Rare Earth Materials(hereinafter referred to as “CREM”) as a joint-stock company in 2001, with Grinm group Co., Ltd. ( previous General Research Institute for Non-ferrous Metals, hereinafter referred to as “GRINM”) as the main sponsor. [More]
    Y2O3 thermal spray powder

    Y2O3 thermal spray powder is a plasma etching-resistant material for semiconductor industrial wafer processing equipment. It can avoid the corrosion of high-energy fluorine plasma on the components in the chamber during plasma etching. In addition, It can also avoid the deposition of volatile fluoride generated during the etching process on the wafer surface. Ultimately, the component's service life is increased, and the wafer contamination is reduced. Grirem Advanced Materials Co., Ltd. can supply high-purity Y2O3 granulation powder with various particle sizes according to customized requirements.

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